Decision Wave Equation of Piezoactuator for Nanotechnology and Adaptive Optics
Abstract
Abstract: Decision of wave equation, structural-parametric model, parametric structural schematic diagram,
transfer functions of the piezo actuator are obtained using the Laplace transform. Effects of geometric and
physical parameters of the piezo actuator and the external load on its dynamic characteristics are determined.
The transfer functions and the parametric structural schematic diagram of the piezo actuator for the transverse,
longitudinal, shift piezoelectric effects are obtained from the structural-parametric model of the piezo actuator.
For calculation of the control systems for nanotechnology with the piezo actuator its the parametric structural
schematic diagram and the transfer functions are determined. The generalized structural-parametric model
and the generalized parametric structural schematic diagram of the piezo actuator for nanotechnology and
adaptive optics are constructed.
